연세대학교 공동기기원 - Yonsei University

• Measurement Head : USB video camera, LED 빛 조절자
• Sensor Head and Stylus Assembly
• Sample-Positioning Stage
• Scan Stage
• Electronics
• Base Feet : Urethane polymer base feet
• Environmental Enclosure
• EMO Box
• Computer System : Windows 7.0;
• Vibration Isolation : Vibration isolation solutions available
• vertical resolution : 0.1 nm @ 6.5 um range, 1.0 nm @ 65.5 um range, 8.0 nm @ 524 um range  

• Measurement Capability :Two-dimensional surface profile measurements;
• Stylus Force : 1 to 15mg
• Stylus Radius : 2um
• Sample X/Y Stage : Manual 100mm(4in.) X/Y, Motorized 150mm(6in.) X/Y
• Scan Length Range : 55mm(2in.)
• Data Points per Scan : 120,000 maximum
• Max. Sample Thickness : 50mm(1.95in.)
• Step Height Repeatability : 4?, 1sigma on steps ≤1um (30 scans using a 12.5um stylus)
• Vertical Range : 1mm (0.039in.)
• Vertical Resolution :  0.1 nm @ 6.5 um range, 1.0 nm @ 65.5 um range, 8.0 nm @ 524 um range  
• Input Power : 100-240VAC, 50-60Hz
• Temperature Range : Operating Range, 20 and 25℃
• Humidity Range : ≤80%, non-condensing

• Step height
• Roughness

단차 측정 사용 가능

• 기기사용 중 본인 부주의로 인한 고장은 책임지고 보상해야함. (stylus tip파손시 보상)
• 당일 예약 취소 시, 사용료 100% 패널티로 부과됨.